Integrated Electron Backscatter Diffraction and X-Ray Energy Dispersive Spectroscopy in the Scanning Electron Microscope
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چکیده
منابع مشابه
Nano-structural Characterization of Post-annealed ZnO Thin Films by X-ray Diffraction and Field Emission Scanning Electron Microscopy
ZnO thin films were deposited on Si(400) substrates by e-beam evaporation technique, and then post-annealed at different annealing temperatures (200-800°C). Dependence of the crystallographic structure, nano-strain, chemical composition and surface physical Morphology of these layers on annealing temperature were studied. The crystallographic structure of films was studied using X-Ray Diffracti...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2005
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927605501132